Porous Silicon Sensors- Elusive and Erudite


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International Journal on Smart Sensing and Intelligent Systems

Professor Subhas Chandra Mukhopadhyay

Exeley Inc. (New York)

Subject: Computational Science & Engineering , Engineering, Electrical & Electronic


eISSN: 1178-5608



VOLUME 1 , ISSUE 1 (March 2008) > List of articles

Porous Silicon Sensors- Elusive and Erudite

Prof. H. Saha *

Keywords : Porous Silicon, Sensing application, Barriers of porous silicon

Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 1, Issue 1, Pages 34-56, DOI: https://doi.org/10.21307/ijssis-2017-277

License : (CC BY-NC-ND 4.0)

Published Online: 13-December-2017



Porous Silicon Sensors have been fabricated and tested successfully over the last few years as humidity sensors, vapour sensors, gas sensors, piezoresistive pressure sensors and bio- sensors. In each case it has displayed remarkably sensitivity, relatively low temperature operation and ease of fabrication. Brief description of fabrication and properties of all these types of different sensors is reported in this paper. The barriers of porous silicon like contact, non- uniformity, instability etc. are also discussed.

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1] H. Saha, S. Dey, C. Pramanik, J. Das and T. Islam, Porous Silicon-Based Smart Sensors, Encyclopedia of Sensors, ed. C.A. Grimes, E.C. Dickey and M.V. Pisako, Vol.8, pages 163-196, 2006. Americal Scientific Publishers.
2] C. Baratto, G. Faglia, G. Sberveglieri, Z. Galurro, L. Panchesi, C. Olon and L. Pavesi, Sensors 2, 121 (2002).
3] H. Saha, J. Das and S.M. Hossain, Asian J. Physics, 12 (283), 323 (2003).
4] T. Taliercio et.al. Sensors Actuators A, 46-47, 43 (1995).
5] T. Das, S. Dey, S.M. Hossain, Z.M. Rittersme and H. Saha, IEEE Sensors, Journal 3(4), 414 (2004).
6] J. Das, S.M. Hossain, S. Chakraborty and H. Saha, Sensors and Actuators, A 94, 44 (2001).
7] Z. M. Rittersme, Humidity Sensors – Review, Sensors and Actuators.
8] S. J. Kim, S. H. Lee, C. J. Lee, organic vapour sensing by current response of porous silicon layer, J. Phys. D., Appl. Phys. 34, (2002), 3505-3509.
9] K. Watanabe, T. Okada, L. Choe, Y. Sato, organic vapour sensitivity in a porous silicon device, Sensors and Actuators B, 33 (1996), 194-197.
10] A. Motohashi, M. Rinike, M. Kawakami, H. Aoyagi, A. Kinoshita, A. Saton, Identification of water molecules in low humidity and possibility of quantitative gas analysis using porous silicon gas sensor, Jpn. J. Appl. Phys. Part-I, 35 (1996) 4253-56.
11] L. Pavesi, PS NO2 has sensors, sensors & Actuators A.
12] C. Baratto, E. Comini, G. Faglia, G. Sberveglieri, G. Di Francia, F.De Filippo, V. La Ferrara, L. Quercia, L. Lanullotti, Gas Detection with a porous silicon based sensors, Sensors and Actuators B, Vol. 65, 2000, pp. 257-259.
13] T.E. Bell, P.T. Genissen, D. DeMunter and M. Kuhl, Porous Silicon as a Sacrificial Material, J. Micromech. Microeng, Vol. 6, pp. 361-369, 1996.
14] C. Pramanik and H. Saha, Piezoresistive Pressure sensing by Porous Silicon Membrane, IEEE Sensors Journal, Vol. 6, No.2, April 2006, pp. 301-309.
15] C. Pramanik, S. Banerjee, H. Saha and C.K. Sarkar “Piezoresistivity of Silicon Quantum well wire” – Nanotechnology, 17, (2006) 3209-3214.
16] C.A. Betty, R. Lal, D.K. Sharma, J. V. Yakhimi, J. P. Mittal, Macroporous Silicon based Capacitive affinity sensor – fabrication and electrochemical studies, sensors and actuators B 97 (2004), pp. 334-343.
17] M. Archer, M. Christophersen, P. M. Fauchet, Electrical Porous Silicon Chemical sensor for detection of organic solvents, sensors and actuators, B 106 (2005) 347-357.
18] Finny P. Mathew and Evangelyn C. Alocilja, Fabrication of Porous Silicon Based Biosensors, ‘0-780 3-8133-5/03/$ 15.00 2003 IEEE.
19] Porous Silicon based biosensor for pathogenor detection, Biosensor Bioelectronics, Vol. 20 (8), pp. 1656-61 (2005).
20] Lisa A. Delonise and Benjamin L. Miller, Quantitative Assessment of Enzyme Immobilisation capacity in porous silicon, Analytical chemistry A-H, 2004.
21] M. Archer and PM Fanchet, Electrical Sensing of DNA hybridization in porous silicon layers, Phys. Status Solidi a 198, 503-7.
22] ISAMA – IIT Kgp paper on contact.
23] R. J. Martin – Palna, J. Perez – Rigueiro, R. Guerrero – Lemus, J.D. Moreno and J. M. Martinez – Duart, Aging of aluminium electrical contacts to porous silicon, J. Appl. Phys. 85, January (1991), 583-586.
24] J. Kanungo, C. Pramanik. S. Bandopadhyay, U. Gangopadhyay, L. Das, H. Saha and Rober TT Gettens, Improved contacts on a porous silicon layer by electroless nickel plating and copper thicknessing, semiconductor Science and Technology, 21, (2006) 964-970.
25] S. Dhar and S. Chakraborti, Electroless Nickel Matel contacts on porous silicon App;. Phys, Letter 68, 1392-3.
26] F.A. Harraz, T. Sukka and Y Holga, Immersion plating of nickel onto a porous silicon layer from fluoride solutions physics status solidi a 197 p. 51-56 (2003).
27] S. M. Hossain, S. Chakraborty, S. K. Dutta, J. Das and H. Saha, J. Luminescence, 91, 195 (2000).
28] B. Gellowz, T. Nakagawn and N. Koshide, Enhancement of the quantum efficiency and suitability of electroluminescence from porous silicon by anodic passivation, B. Gelloz, T. Makagawa and N. Koshide, Appl. Phys. Letts., 73 (1998) pp 2021-2023.
29] Tarikul Islam, PhD thesis, Developmentof Porous Silicon Based Humidity Sensor and Organic Vapor Sensor Array with Integrated Signal Processing Systems,2007, Jadavpur University
30] T.Islam,J.Das,H.Saha,Porous silicon based organic vapour sensors array for e-nose applications,5th IEEE Senor Conf, Oct 22-25,2006,Daegue,Korea
31] K.Luong,A.Sine,S.Bhansali,Devlopmen of a highl sensitive poroussi-based hydrogen snsor using Pd nanostructures, Sensors and Actuators, B,111-112(2005),125-129
32] J.M.Borky, K.D.Wise, Integrated Signal Conditioning for Silicon Pressure Sensors, IEEE Transactions on Electron Devices, vol.ED-26, no.12,p.1906(1979).
33] A. Druzhinin, E. Lavitska, I. Maryamova, "Medical pressure sensors on the basis of silicon microcrystals and SOI layers", Sensors and Actuators B, vol. 58,pp. 415-419,1999.
34]. Properties of porous silicon, ed Canham L.T.INSPEC: The institution of Electrical En gineers, London, UK, 1997.
35] Lorraine Buckberry, Sue Bayliss, Materials World, vol.7, no.4, pp.213-15,1999.
36] Chan S.,fauchet P.M., Li Y.,Rothberg L.J., Proc.SPIE, vol.23,p.3912,2000.37] Janshoff A., Dancil K.P..S.,Steinem C.,Greiner D.P., Lin V.S.Y., Gurtner C., Motesharei K., Sailor M.J., Ghadiri M.R., J. Am Chem Soc.,vol.120, p.12108, 1998.
38]. Lin V.S.Y.,Motesherai K.,Dancil K.P.S., Sailor M.J., Ghadiri M.R., Science, vol.278, p.840,1997.
39] Selena Chen, Scott R.Horner,P.M.Fauchet, B.Miller, “Identification of gram negative bacteria using Nanoscale silicon microcavities”, J. Am. Chem Soc., vol.133,pp.11797-11798,2001.
40] DeLouise, L. A.; Miller, B. L. Proc. SPIE 2004, 5357, 111-125.
41] DeLouise, L. A.;P.M.Fauchet, Miller, B. L, Alice Pentland, “Hydrogel supported optical microcavity sensors”, Advanced Materials, vol.17, pp.2199-2203(2005).
42] Lisa A. DeLouise, Peng Meng Kou, and Benjamin L. Miller, “Cross-Correlation of Optical Microcavity Biosensor Response with Immobilized Enzyme Activity.Insights into Biosensor Sensitivity”, Analytical Chemistry A-H, 2005
43]. Lisa A. DeLouise and Benjamin L. Miller, “Enzyme Immobilization in Porous Silicon:Quantitative Analysis of the Kinetic Parameters for Glutathione-S-transferases”, Anal. Chem.2005, 77,1950-1956.
44] Mathew FP, Alocilja EC, “Porous silicon based biosensor for pathogen detection”, Biosensor Bioelectronics, vol.20(8),pp.1656-61(2005).
45].L.D.Stefano, M.Rossi, M.Staiano, G.Mamone, A.Parracino, L.Rotiroti, I.Rendina, M.Rossi, S.D.Auria, “Glutamine Binding Protein from Escherichia coli specifically binds a wheat gliadin peptide allowing the deisgn of a new porous silicon based optical biosensor”, J. of Americal Chemical Society, available online from March 2006.
46].A.Motohashi, M.Ruike, M.Kawakami, H.Aoyagi, A.Kinoshita, A.Satou, “Identification of water molecules in low humidity and possibility of quantitative gas analysis using porous silicon gas sensor”, Jpn. J. Appl. Phys.,1996, p.4253
47]. A.Motohashi, M.Kawakami, H.Aoyagi, A.Kinoshita, A.Satou, “Gas identification by a single gas sensor using porous silicon as the sensitive material”, Jpn. J. Appl. Phys.,1995, p.5840
48] K.Watanabe, T.Okada, I.Choe, Y.Sato, “Organic vapour sensitivity in a porous silicon device”, Sens. Actuat. B, 1996, p.194
49] S.J.Kim, S.H.Lee,C.J.Lee, “Organic vapour sensing by current response of porous silicon layer”, J.Phys.D: Appl. Phys., 2002, p.3505.