Porous Silicon Sensors- Elusive and Erudite

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International Journal on Smart Sensing and Intelligent Systems

Professor Subhas Chandra Mukhopadhyay

Exeley Inc. (New York)

Subject: Computational Science & Engineering , Engineering, Electrical & Electronic

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VOLUME 1 , ISSUE 1 (March 2008) > List of articles

Porous Silicon Sensors- Elusive and Erudite

Prof. H. Saha *

Keywords : Porous Silicon, Sensing application, Barriers of porous silicon

Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 1, Issue 1, Pages 34-56, DOI: https://doi.org/10.21307/ijssis-2017-277

License : (CC BY-NC-ND 4.0)

Published Online: 13-December-2017

ARTICLE

ABSTRACT

Porous Silicon Sensors have been fabricated and tested successfully over the last few years as humidity sensors, vapour sensors, gas sensors, piezoresistive pressure sensors and bio- sensors. In each case it has displayed remarkably sensitivity, relatively low temperature operation and ease of fabrication. Brief description of fabrication and properties of all these types of different sensors is reported in this paper. The barriers of porous silicon like contact, non- uniformity, instability etc. are also discussed.

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REFERENCES

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