Nanocrystalline ZnO based MEMS Gas Sensors with CMOS ASIC for Mining Applications


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International Journal on Smart Sensing and Intelligent Systems

Professor Subhas Chandra Mukhopadhyay

Exeley Inc. (New York)

Subject: Computational Science & Engineering , Engineering, Electrical & Electronic


eISSN: 1178-5608



VOLUME 1 , ISSUE 2 (June 2008) > List of articles

Nanocrystalline ZnO based MEMS Gas Sensors with CMOS ASIC for Mining Applications

N.P Futane / P. Bhattacharyya / S. Barma / C. Roychaudhuri / H. Saha

Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 1, Issue 2, Pages 430-442, DOI:

License : (CC BY-NC-ND 4.0)

Published Online: 13-December-2017



In this paper a nanocrystalline (nc) zinc oxide based hybrid gas sensor with signal conditioning ASIC has been reported for sensing and transmitting the information about methane concentration from the underground coalmine environment. A low power, low temperature nc zinc oxide MEMS based gas sensor has been designed, fabricated and tested for the purpose with a power consumption of ~70mW and sensitivity of 76.6 % at 1.0% methane concentration at a sensor operating temperature of 1500C. For transmitting the output of the gas sensor, a voltage controlled oscillator (VCO) chip integrated with a low noise amplifier has been fabricated in 0.35μm CMOS technology to convert the voltage output of the gas sensor to desirable frequency. The power consumption of the chip has been obtained to be around 3mW. The amplifier gain is set suitably ~13 to apply the desirable control voltage (~1.2V-3.2V)to the VCO. The noise of the amplifier has been obtained to be around 2μV/Hz1/2. The output frequency of the VCO varies from 20kHz to 100kHz for the change in methane concentration from 0 to 1%. The output of the VCO chip can be applied as a modulating signal to a commercially available transceiver, which transmits the signal to the control room.

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[1] Hagleitner. C, Hierlemann A, Lange D, Kummer A, Kerness N, Brand O, Baltes H, Smart single chip gas sensor microsystem, Nature 2001
[2] Hierlemann A, Koll A, Lange D, Hagleitner. C,Kerness N, Brand O, Baltes H, Application-specific sensor system based on CMOS chemical microsensors,Sensors and actuators B 70 (2000) 2-11.
[3] Hagleitner. C, Lange D, Kerness N, Kummer A, Song W H, Hierlemann A, Brand O, Baltes H, CMOS single chip multisensor gas detection system,Proc. IEEE MEMS (2002) conference.
[4] K. Chatterjee, S. Chatterjee, A. Banerjee, M. Raut, N. C. Pal, A. Sen, H. S. Maiti,The effect of palladium incorporation on methane sensitivity of antimony doped tin oxide, Materials Chemistry and Physics 81 (2003) 33-38.
[5] S. H. Hahn, N. Barsan and U. Weimar, Investigation of CO/CH4 mixture measured with differently doped SnO2 sensors, Sensors and Actuators B 78 (2001) 64-68.
[6] D.Kohl, Function and application of gas sensors, J.Phys.D:Appl.Phys. 34(2001) R125-R149
[7] Figaro Products Catalogue (2006), Figaro gas sensors 2000-series, Figaro Engineering Inc., European Office, Oststrasse 10, 40211 Dusseldorf, Germany
[8] K. D.Mitzner, J. Strnhagen, D. N. Glipeau, Development of micromachined
hazardous gas sensor array, Sensors and Actuators B 93 (2003) 92-99.
[9] P. Bhattacharyya, P. K. Basu, H. Saha, S Basu, Fast Response Methane Sensor using Nanocrystalline Zinc Oxide Thin Films Derived by Sol-Gel method, Sensors and Actuators B 124 (2007) 62-67.
[10] K. Wongcharee, M. Brungs, R. Chaplin, R. Pillar, Y.-J. Hong, E. Sizgek, J.Australasian Ceramic Soc.37 (2001) 1.
[11]: M.Blaschke, T. Tille, P.Robertson, S. Mair, U.Weimar, .H. Ulmer, MEMS Gas-Sensor Array for Monitoring the Perceived Car-Cabin Air Quality, IEEE SENSORS JOURNAL, 6, no 5 (2006) 1298-1308.
[12] M. Afridi, A. Hefner, D. Berning, C. Ellenwood, A. Varma, B. Jacob, S. Semancik, MEMS-based embedded sensor virtual components for system-on-a-chip (SoC), Solid-State Electronics 48 (2004) 1777–1781.
[13] Graf, M., Barrettino, D., Zimmermann, M., Hierlemann, A., Baltes, H., Hahn, S., Barsan, N., Weimar, U, CMOS monolithic metal-oxide sensor system comprising a microhotplate and associated circuitry, IEEE Sensors Journal 4, Issue1, (2004) 9-6.
[14] G. C. Cardinali, L. Dori, M. Fiorini, I. Sayago, G. Faglia, C. Perego, G. Sberveglieri, V. Liberali, F. Malobertiand D. Tonietto, “A Smart Sensor System for carbon Monoxide Detection”, Analog Integrated Circuits and Signal Processing, vol.14, pp.275-296,1997
[15] http// current source IC LM334S8 )
[16] R. Jacob, Harry W. Li and David E. Boyce “ CMOS circuit design,layout, and simulation” IEEE press 2005.
[17] Phillip E. Allen and Douglas R. Holberg “ CMOS Analog Circuit Design”Oxford University press 2004.
[18] SmartRF CC2500 Preliminary Data Sheet 2005.
[19] Zhi-Ming Lin, Kuei-Chen Huang, Jun-Da Chen, And Mei-Yuan Liao, “A CMOS Voltage-Controlled Oscillator With Temperature Compensated”, The Second IEEE Asia Pacific Conference on ASICs, pp.85-86, 2000.
[20] Liang Dai and Ramesh Harjani, “A Low-Phase-Noise CMOS Ring Oscillator With Differential Control And Quadrature Outputs” IEEE International Symposium on Circuits and System,,pp.134-138,2001