DESIGN AND OPTIMIZATION OF BULK MICROMACHINED ACCELEROMETER FOR SPACE APPLICATIONS

Publications

Share / Export Citation / Email / Print / Text size:

International Journal on Smart Sensing and Intelligent Systems

Professor Subhas Chandra Mukhopadhyay

Exeley Inc. (New York)

Subject: Computational Science & Engineering, Engineering, Electrical & Electronic

GET ALERTS

eISSN: 1178-5608

DESCRIPTION

3
Reader(s)
7
Visit(s)
0
Comment(s)
0
Share(s)

VOLUME 1 , ISSUE 4 (December 2008) > List of articles

DESIGN AND OPTIMIZATION OF BULK MICROMACHINED ACCELEROMETER FOR SPACE APPLICATIONS

Shubhajit Roy Chowdhury * / Dipankar Chakrabarti * / Hiranmay Saha / Thampi Paul * / Jaspreet Singh * / M. M. Nayak * / K. Rajanna * / M. Sasi Kumar

Keywords : Microstructure, Microelectromechanical Systems, Accelerometer

Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 1, Issue 4, Pages 1,019-1,030, DOI: https://doi.org/10.21307/ijssis-2017-333

License : (CC BY-NC-ND 4.0)

Published Online: 02-November-2017

ARTICLE

ABSTRACT

The accelerometers used for Inertial Navigation in satellite launch vehicles demand excellent performance in terms of sensitivity, noise immunity, linearity, bias and scale factor stability over time and environmental changes. Detailed and in-depth design of the microstructure by computer simulation is required to ensure structural integrity and reliability of the microstructure. The microstructure of the accelerometer consists of a proof mass suspended from the mounting frame by beam springs. Extensive Finite Element simulation of the silicon microstructure has been carried out to obtain application specific optimum design parameters. Based on the deflection, frequency and stress analyses the optimum geometry and dimensions of the accelerometer have been determined. Noise analysis has been carried out, the performance of the accelerometer has been predicted and its compliance to the expected performance is ensured.

Content not available PDF Share

FIGURES & TABLES

REFERENCES

[1] Elwenspoek, “Mechanical Microsensors,” Springer, 2001
[2] Gad-El-Hak & Mohamed, “MEMS Hand Book,”CRC Press, Boca raton, 2002.
[3] Thampi Paul P, Vijin Jenius S and Sasikumar M, “Characterization and Nonlinearity compensation of Capacitive sensing MEMS accelerometer for launch vehcle applications,” in Proceedings of the National Society for Insturmentation of ISOI (NSI-30), 2005, pp. 417-421.
[4] Hsu & Tai-Ran, “MEMS and Microsystems-Design and Manufacture,” Tata McGraw-Hill, New Delhi, 2002
[5] Thampi Paul, Roy Paul V and Sasikumar M, “Design and Analysis of High performance differential capacitance readout circuit for Navigational grade MEMS accelerometer,” in Proceedings of the National Society for Instrumentation of ISOI (NSI-30), 2005, pp. 410-416.
[6] Fraden, “Hand Book of Modern Sensors-Physics, Design and Application,” Springer, New York 2004

EXTRA FILES

COMMENTS