SEARCH WITHIN CONTENT
Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 2, Issue 2, Pages 213-228, DOI: https://doi.org/10.21307/ijssis-2017-347
License : (CC BY-NC-ND 4.0)
Published Online: 02-November-2017
This paper presents the algorithm on the compensator design for eliminating the nonlinearity in the capacitive pick-off MEMS open-loop accelerometer and its implementation in the FPGA. A simple and elegant method is presented for the purpose. In the sensor model of compensator, upto 3rd order terms are taken. The first step approximation is derived using linear model. This approximation is improved over iterations to reduce the non-linearity. With this method, the inertial navigational grade performance is achieved. The algorithm is coded in VHDL, simulated, synthesized and implemented in the FPGA and tested. Test results matches closely with that of simulations. The VHDL design can be easily targeted into an ASIC to realize an integrated smart sensor.
 Thampi Paul etl “Design and optimization of bulk micromachined accelerometer for space applications” in International Journal on Smart Sensing and Intelligent Systems,
2008, pp 1019-1030.
 Elwenspoek, “Mechanical Microsensors,” Springer, New York, 2002
 Gad-El-Hak & Mohamed, “MEMS Hand Book,”CRC Press, Boca raton, 2002.
 Thampi Paul P, Vijin Jenius S and Sasikumar M, “Characterization and Nonlinearity compensation of Capacitive sensing MEMS accelerometer for launch vehcle applications,” in Proceedings of the National Society for Insturmentation of ISOI (NSI-30), 2005, pp. 417-421.
 Hsu & Tai-Ran, “MEMS and Microsystems-Design and Manufacture,” Tata McGraw-Hill, New Delhi, 2002
 Fraden, “Hand Book of Modern Sensors-Physics, Design and Application,” Springer, New York, 2004
 J. BHASKER, “ A VHDL PRIMER”, Pearson Education, 3rd e.d., pp. 316-318, New Delhi, 2003