Enhanced LPG response characteristics of SnO2 thin film based sensors loaded with Pt clusters


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International Journal on Smart Sensing and Intelligent Systems

Professor Subhas Chandra Mukhopadhyay

Exeley Inc. (New York)

Subject: Computational Science & Engineering, Engineering, Electrical & Electronic


eISSN: 1178-5608



VOLUME 2 , ISSUE 3 (September 2009) > List of articles

Enhanced LPG response characteristics of SnO2 thin film based sensors loaded with Pt clusters

Divya Haridas * / Arijit Chowdhuri / K. Sreenivas / Vinay Gupta

Keywords : Gas Sensor, Pt clusters-SnO2, Thin films, Sputtering, LPG

Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 2, Issue 3, Pages 503-514, DOI: https://doi.org/10.21307/ijssis-2017-364

License : (CC BY-NC-ND 4.0)

Published Online: 03-November-2017



RF sputtered SnO2 thin films (90 nm thick) loaded with clusters of nanoscale (8 nm) metal catalysts (Pt, Ag, Ni, Pb, Al, Pd) are investigated for LPG detection. SnO2 film loaded with Pt catalyst clusters exhibits enhanced response (~ 7.5×102) to 200 ppm of LPG at a relatively low operating temperature (185oC) with a fast response time of 100s. Variation of thickness of Pt clusters in the nanoscale range (2 to 20 nm) is seen to significantly influence the sensor response characteristics. Enhanced performance is observed for SnO2 thin films loaded with 10 nm thick platinum clusters that exhibited a high response (~ 5 x 103) at an operating temperature, of 220oC. Preliminary results indicate the potential application of prepared sensor structure of Pt clusters (10nm)/SnO2 (90 nm)/IDE/glass substrate for efficient detection of LPG at relatively low temperature.

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