DEVELOPMENT AND CHARACTERIZATION OF SURFACE MICRO-MACHINED MEMS BASED VARACTOR

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International Journal on Smart Sensing and Intelligent Systems

Professor Subhas Chandra Mukhopadhyay

Exeley Inc. (New York)

Subject: Computational Science & Engineering, Engineering, Electrical & Electronic

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VOLUME 3 , ISSUE 1 (March 2010) > List of articles

DEVELOPMENT AND CHARACTERIZATION OF SURFACE MICRO-MACHINED MEMS BASED VARACTOR

Subha Chakraborty * / A. Bhattacharya / Ashesh Ray Chaudhuri / T.K. Bhattacharyya

Keywords : MEMS, varactor, VCO, capacitance tuning ratio, pull-in, SEM, vibration spectrum, LDV.

Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 3, Issue 1, Pages 94-107, DOI: https://doi.org/10.21307/ijssis-2017-382

License : (CC BY-NC-ND 4.0)

Published Online: 13-December-2017

ARTICLE

ABSTRACT

This paper presents complete behavioral analysis of a surface micro-machined MEMS varactor for frequency tuning application in voltage controlled oscillators in RF applications with high Quality factor and tunability. The dimensions of the MEMS device have been optimized with Finite Element Method based CoventorWare analysis and verified through lumped parameter analysis in Saber platform. The MEMS varactor has been fabricated with the PolyMUMPs process. The paper also describes the Mechanical and electrical characterization of the MEMS varactor to meet the designed specification.

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REFERENCES

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