MICROSTRUCTURING OF SU-8 RESIST FOR MEMS AND BIO-APPLICATIONS

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International Journal on Smart Sensing and Intelligent Systems

Professor Subhas Chandra Mukhopadhyay

Exeley Inc. (New York)

Subject: Computational Science & Engineering, Engineering, Electrical & Electronic

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eISSN: 1178-5608

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VOLUME 3 , ISSUE 1 (March 2010) > List of articles

MICROSTRUCTURING OF SU-8 RESIST FOR MEMS AND BIO-APPLICATIONS

P.K. Dey * / B. Pramanick / A. RaviShankar / P. Ganguly / S. Das

Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 3, Issue 1, Pages 118-129, DOI: https://doi.org/10.21307/ijssis-2017-384

License : (CC BY-NC-ND 4.0)

Published Online: 13-December-2017

ARTICLE

ABSTRACT

Some studies on the fabrication of micro-needles, micro-pillers, and micro-channels using SU-8 negative photoresist for MEMS and bio-applications are reported. The SU-8 processing technology was standardized for the purpose. Micro-pillars were fabricated on SU-8 polymer by soft lithographic technique. Micro-needles were realized on SU-8 film utilizing lensing effect of the etched groove structure of the glass substrate. Micro-channel was fabricated by molding of PDMS polymer on patterned SU-8 ridge structure. Structural characterization of the fabricated structures were investigated using optical microscope and SEM.

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REFERENCES

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