FUNDAMENTAL STUDY OF MAGNETICALLY LEVITATED CONTACT-FREE MICRO-BEARING FOR MEMS APPLICATIONS

Publications

Share / Export Citation / Email / Print / Text size:

International Journal on Smart Sensing and Intelligent Systems

Professor Subhas Chandra Mukhopadhyay

Exeley Inc. (New York)

Subject: Computational Science & Engineering, Engineering, Electrical & Electronic

GET ALERTS

eISSN: 1178-5608

DESCRIPTION

4
Reader(s)
8
Visit(s)
0
Comment(s)
0
Share(s)

VOLUME 3 , ISSUE 3 (September 2010) > List of articles

FUNDAMENTAL STUDY OF MAGNETICALLY LEVITATED CONTACT-FREE MICRO-BEARING FOR MEMS APPLICATIONS

T. Nakao * / H. Han / Y. Koshimoto

Keywords : Micro-bearing, magnetic levitation, eddy-current, contact-free, MEMS

Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 3, Issue 3, Pages 536-549, DOI: https://doi.org/10.21307/ijssis-2017-407

License : (CC BY-NC-ND 4.0)

Published Online: 13-December-2017

ARTICLE

ABSTRACT

In this paper, the authors introduced a new approach to realize a contact-free micro-bearing for MEMS (Micro-Electro-Mechanical-Systems) applications. In the proposed idea, the mechanism of magnetic repulsion by eddy current was employed. Numerical analysis and experimental research was performed. In the proposed structure having a ringed magnetic circuit having a circularly-arranged gap (gapped-core), the generated magnetic flux was concentrated with high density and showed precipitously gradient in the magnetic field and also showed a larger of repulsive force comparing to the general electromagnetic (iron-core). Advantage of the proposed method and its viability as a contact-free Micro-bearing was discussed.

Content not available PDF Share

FIGURES & TABLES

REFERENCES

[1] Lichuan Li, Tadahiko SHINSHI, Jiro KUROKI and Akira SHIMOKOHBE, ”A One-Axis-Controlled Magnetic Bearing and Its Performance”, JSME, Series C,Vol.46, No.2, 2003, pp. 391-396.
[2] T. Hirano, T. Furuhata, and H. Fujita; IEICE Trans. Election., Vol. E78-C, (1995), pp. 132-138.
[3] NIKOLAJSEN, JORGENL, “Experimental verification of an eddy-current bearing”, NASA, Lewis Research Center, Rotordynamic Instability Problems in High-Performance Turbomachinery, 1988 p 389-394 (SEE N89-22891 16-37); UNITED STATES; 1989
[4] M. T. Thompson, "Eddy current magnetic levitation. Models and experiments," Potentials, IEEE, vol. 19, 2000, pp. 40-44.
[5] S. C. Mukhopadhyay, S. C. Mukhopadhyay, S. Yamada, C. Chakraborty, and D. Kacprzak, “Fabrication of a Repulsive-Type Magnetic Bearing Using a Novel Arrangement of Permanent Magnets for Vertical-Rotor Suspension”, IEEE TRANSACTIONS ON MAGNETICS, Vol. 39, No. 5, SEPTEMBER 2003, pp. 3220-3222.
[6] M. D. Simon, A.K. Geim, “Diamagnetic levitation: Flying frogs and floating magnets invited”, Journal of Applied Physics, Vol. 87, No. 9, (2000), pp. 6200-6204.
[7] Fumio Matsumura (1993), “Magnetic Suspension Technology –Magnetic levitation systems and Magnetic bearings–”, (Japanese Book), Published by CORONA PUBLISHING CO., LTD., pp. 17-75.
[8] I. Marinova, V. Mateev, H. Endo and Y. Saito, “Modeling and Measurement System for Magnetic Field Distributions in Biological Structures”, INTERNATIONAL JOURNAL ON SMART SENSING AND INTELLIGENT SYSTEMS, VOL. 2, NO. 2, JUNE 2009, pp. 262 – 278.
[9] S. C. Mukhopadhyay, G. Sen Gupta, and S. Demidenko, “ntelligent Method of Teaching Electromagnetics Theory: Measurements under Virtual Environment”, INTERNATIONAL JOURNAL ON SMART SENSING AND INTELLIGENT SYSTEMS, VOL. 1, NO. 2, JUNE 2008, pp. 443-458.
[10] Ginzburg, L. Frumkis, B.Z. Kaplan, A. Sheinker, N. Salomonski, “INVESTIGATION OF ADVANCED DATA PROCESSING TECHNIQUE IN MAGNETIC ANOMALY DETECTION SYSTEMS”, INTERNATIONAL JOURNAL ON SMART SENSING AND INTELLIGENT SYSTEMS, VOL. 1, NO. 1, MARCH 2008, pp. 110-122.
[11] Sotoshi YAMADA , “ High-Spatial-Resolution Magnetic-Field Measurement by Giant Magnetoresistance Sensor – Applications to Nondestructive Evaluation and Biomedical Engineering ”, INTERNATIONAL JOURNAL ON SMART SENSING AND INTELLIGENT SYSTEMS, VOL. 1, NO. 1, MARCH 2008, pp. 160-175.
[12] Jiro Kuroki, Tadahiko Shinshi, Lichuna Li and Akira Shimokohbe, “Miniaturization of a one-axis- controlled magnetic bearing”, Precision Engineering, Vol 29, 2005, pp. 208-218.
[13] Atsushi YUMOTO, Tadahiko SHINSHI, Xiaoyou ZHANG and Akira SHIMOKOHBE, “A One-degree-of-freedom Controlled Magnetic Bearing for Compact Centrifugal Pumps”, JSME, Vol.74, No.742, 2008, pp. 1625-1630.
[14] Kyihwan Park, Kee-Bong Choi, Soo-Hyun Kim, and Yoon Keun Kwak, “Magnetic Levitated High Precision Positioning System Based on Antagonistic Mechanism”, IEEE Transaction on Magnetics, Vol. 32, No. 1, 1996, pp. 208-219.
[15] Thomas D. Rossing and John R. Hull, “Magnetic Levitation”, The Physics Teacher, Dec. 1991, pp. 552-562.

EXTRA FILES

COMMENTS