Share / Export Citation / Email / Print / Text size:

International Journal on Smart Sensing and Intelligent Systems

Professor Subhas Chandra Mukhopadhyay

Exeley Inc. (New York)

Subject: Computational Science & Engineering , Engineering, Electrical & Electronic


eISSN: 1178-5608



VOLUME 8 , ISSUE 1 (March 2015) > List of articles


Souad Oukil * / Abdelmadjid Boudjemai * / Nabil Boughanmi *

Keywords : Power system, MEMS, capacitive accelerometer, optimization, proof-mass, L-shaped beam, GSA, frequency.

Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 8, Issue 1, Pages 65-89, DOI: https://doi.org/10.21307/ijssis-2017-749

License : (CC BY-NC-ND 4.0)

Received Date : 12-November-2014 / Accepted: 07-January-2015 / Published Online: 01-March-2015



Due to their small size, low weight, low cost and low energy consumption, MEMS (Micro Electro-Mechanical Systems) accelerometers have achieved great commercial success in recent decades. The objective of this paper is to find the optimum design for a typical MEMS accelerometer, which satisfies a set of given constraints. Due to the complex nature of the problem, a gravitational search algorithm (GSA) is developed for optimization. The GSA attempts to optimize the inter-plate gap while satisfying all other engineering goals. The model was constructed in Msc Patran and Nastran software were calculated and model’s response was found. In this paper the optimal design from the theoretically derived gravitational search algorithm is compared to finite element model in order to ascertain its accuracy and verify the results.

Content not available PDF Share



[1] A. Zia, M.A.S Rahman, S.C. Mukhopadhyay, I. H. Al-Bahadly, P. L. Yu, C. Gooneratne, J. Kosel and T.S. Liao, MEMS Based Impedimetric Sensing of Phthalates, Proceedings of IEEE I2MTC 2013 conference, IEEE Catalog number CFP13IMT-CDR, ISBN 978-1-4673-4622-1, May 6-9, 2013, Minneapolis, USA, pp. 855-860.
[2] A. I. Zia, S. C. Mukhopadhyay, P.L. Yu, I.H. Al-Bahadly, C. P. Gooneratne, J. Kosel, “Post Annealing Performance Evaluation of Printable Interdigital Capacitive Sensors by Principal Component Analysis”, IEEE Sensors Journal, 2014, http://dx.doi.org/10.1109/JSEN.2014.2355224.
[3] A. Sundaram, M. Maddela, R. Ramadoss, and L. Feldner, MEMS-Based electronically steerable antenna array fabricated using PCB technology, Microelectromechanical Systems, Journal of, vol. 17, no. 2, pp. 356-362, Apr. 2008.
[4] C-H. Han, D-H. Choi, and J-B. Yoon, Parallel-plate MEMS variable capacitor with superior linearity and large tuning ratio using a levering structure," Microelectromechanical Systems, Journal of, vol. 20, no. 6, pp. 1345-1354, Dec. 2011.
[5] M. Kraft, C. Lewis, T. Hesketh, and S. Szymkowiak, A novel micromachined accelerometer capacitive interface, Sensors and Actuators A: Physical, vol. 68, no. 13, pp. 466-473, Jun. 1998.
[6] Y. Fenglin, G. Shiqiao, Z. Jie, L. Haipeng, N. Shaohua, J. Lei , The vibration and measurement of driving mode of the two-stage decoupled micro-machined gyroscope, Int. J. Smart Sens. Intell. Syst. 6 (2013) 1599-1616.
[7] N. El-Bendary, Q. Tan, F. C. Pivot, A. Lam, Fall detection and prevention for the elderly: a review of trends and challenges, Int. J. Smart Sens. Intell. Syst. 6 (2013) 1230-1266.
[8] S. J. Kim, G. Flowers, C. Chen, and R. Dean, \Active vibration control and isolation for micro-machined devices," in ASME 2008 Conference on Smart Materials, Adaptive Structures and Intelligent Systems, Jan. 2008, pp. 657-664.
[9] Ding W., (2013), MEMS pressure sensor, Market & technology report, Yole Développement.
[10] Jeff Perkins, MEMS Everywhere: Sensing the world around you, and more Semicon West, Yole Developpement, 2012 available at http://www.semiconwest.org/sites/ semiconwest.org/files/docs/.
[11] L. M. Roylance and J. B. Angell, A Batch-Fabricated Silicon Accelerometer, IEEE Trans. Elec. Dev., ED-26, 1911 (1979).
[12] Trolier Mckinstry and P. Muralt, Thin film piezoelectrics for MEMS, J. Electroceramics, vol. 12, no. 1-2, pp. 7–17, 2004.
[13] T. Berther, G.H. Gautschi, J. Kubler, Capacitive accelerometers for static and low-frequency measurements, Sound and Vibration 30 (6)(1996) 28-30.
[14] H. Chen, S. Shen, M. Bao, Over-range capacity of a piezoresistive micro accelerometer, Sens. Actuators 58 (3) (1997) 197-201.
[15] G. H. Gautschi, Piezoelectric Sensorics. New York: Springer, 2002.
[16] Biter Boga, et al., Modeling of a capacitive Σ-Δ mems accelerometer system Including the noise components and Verification with test results, pp. 821 – 824, doi 10.1109/MEMSYS.2009.4805509-2009 ©IEEE.
[17] Yoshida, K.; Matsumoto, Y.; Ishida, M.; Okada, K. High-Sensitive Three Axis SOI Capacitive Accelerometer Using Dicing Method. Proceedings of Technical Digest of the 16th Sensor Symposium, Toyohashi, Japan, 2–3 June 1998; pp. 25–28.
[18] Vincas Benevicius et al., Identification of Capacitive MEMS Accelerometer Structure Parameters for Human Body Dynamics Measurements, Sensors 2013, 13, 11184-11195; doi:10.3390/s130911184
[19] D.Ozevin et al., Resonant capacitive MEMS acoustic emission transducers, Smart Mater. Struct. 15 (2006) 1863–1871, doi:10.1088/0964-1726/15/6/041.
[20] H. Helvajian, ed, “Microengineering Aerospace Systems”, The Aerospace Press, 1999
[21] S. Cass, “MEMS in Space”, IEEE Spectrum, p.56, July 2001
[22] Robert Osiander, M. Ann Garrison Darrin, John L. Champion (Editors), “MEMS and Microstructures in Aerospace Applications”, CRC (2005) 400 pages, Chapter 11, Micropropulsion technologies, J. Schein, pp. 229.
[23] Hoon Sohn et al., A Review of Structural Health Monitoring Literature: 1996–2001, Los Alamos National Laboratory Report, LA-13976-MS, 2004.
[24] T. Paul, J. Singh, M.M. Nayak, K. Rajanna, M.S. Kumar, Design and optimization of bulk micromachinaded accelerometer for space applications, Int. J. Smart Sens. Intell. Syst. 1 (2008) 1019-1030.
[25] J.S. Botero V, W. Hernández, E. Fernández, Orientation of a triaxial accelerometer using a homogeneous transformation matrix and kalman filters, Int. J. Smart Sens. Intell. Syst. 7 (2014) 1631-1646.
[26] R.R. Craig, A.J. Kurdila, Fundamentals of Structural Dynamics [M], Wiley.com, 2006.
[27] Ki Bang Lee, Principles of Microelectromechanical Systems, John Wiley & Sons, Inc., 2011.
[28] Esmat Rashedi, Hossein Nezamabadi, Saeid Saryazdi. GSA: A Gravitational Search Algorithm. Department of Electrical Engineering, Shahid Bahonar University of Kerman, P.O. Box 76169-133, Kerman, Iran. Information Sciences 179 (2009) 2232–2248.
[29] M. Ghalambaz, A.R. Noghrehabadi, M.A. Behrang, E. Assareh, A. Ghanbarzadeh, N.Hedayat, A Hybrid Neural Network and Gravitational Search Algorithm (HNNGSA) Method to Solve well known Wessinger's Equation, World Academy of Science, Engineering and Technology 73 2011.
[30] Serhat Duman, Yusuf Sonmez, Yusuf Sonmez, Application of Gravitational Search Algorithm for Optimal Reactive Power Dispatch Problem, pp. 519 – 523, 987-1-61284-922-5/11/$26.00©2011 IEEE.
[31] Mohammad Khajehzadeh and Mahdiyeh Eslami, Gravitational search algorithm for optimization of retaining structures, Indian Journal of Science and Technology, pp.1821-1827, Vol. 5 No. 1 (Jan 2012) ISSN: 0974- 6846.
[32] A.Chatterjee and G. K. Mahanti, Comparative performance of gravitational search algorithm and modified particle swarm optimization algorithm for synthesis of thinned scanned concentric ring array antenna, Progress in Electromagnetics Research B, Vol. 25, 331-348, 2010.