L-SHAPED CANTILEVER PARALLEL - PLATE MEMS ACCELEROMETER DESIGN PARAMETERS USING A GRAVITATIONAL SEARCH ALGORITHM

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International Journal on Smart Sensing and Intelligent Systems

Professor Subhas Chandra Mukhopadhyay

Exeley Inc. (New York)

Subject: Computational Science & Engineering , Engineering, Electrical & Electronic

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VOLUME 8 , ISSUE 1 (March 2015) > List of articles

L-SHAPED CANTILEVER PARALLEL - PLATE MEMS ACCELEROMETER DESIGN PARAMETERS USING A GRAVITATIONAL SEARCH ALGORITHM

Souad Oukil * / Abdelmadjid Boudjemai * / Nabil Boughanmi *

Keywords : Power system, MEMS, capacitive accelerometer, optimization, proof-mass, L-shaped beam, GSA, frequency.

Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 8, Issue 1, Pages 65-89, DOI: https://doi.org/10.21307/ijssis-2017-749

License : (CC BY-NC-ND 4.0)

Received Date : 12-November-2014 / Accepted: 07-January-2015 / Published Online: 01-March-2015

ARTICLE

ABSTRACT

Due to their small size, low weight, low cost and low energy consumption, MEMS (Micro Electro-Mechanical Systems) accelerometers have achieved great commercial success in recent decades. The objective of this paper is to find the optimum design for a typical MEMS accelerometer, which satisfies a set of given constraints. Due to the complex nature of the problem, a gravitational search algorithm (GSA) is developed for optimization. The GSA attempts to optimize the inter-plate gap while satisfying all other engineering goals. The model was constructed in Msc Patran and Nastran software were calculated and model’s response was found. In this paper the optimal design from the theoretically derived gravitational search algorithm is compared to finite element model in order to ascertain its accuracy and verify the results.

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