MEMS-based miniature near-infrared spectrometer for application in environmental and food monitoring


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International Journal on Smart Sensing and Intelligent Systems

Professor Subhas Chandra Mukhopadhyay

Exeley Inc. (New York)

Subject: Computational Science & Engineering , Engineering, Electrical & Electronic


eISSN: 1178-5608



VOLUME 7 , ISSUE 5 (December 2014) > List of articles

Special issue ICST 2014

MEMS-based miniature near-infrared spectrometer for application in environmental and food monitoring

S.I. Hintschich * / T. Pügner / J. Knobbe / J. Schröder / P.Reinig Reinig / H. Grüger / H. Schenk

Keywords : scanning grating spectrometer, near infrared spectroscopy, miniaturization, hybrid integration, MEMS, integrated optics, food analysis, materials analysis, environmental monitoring

Citation Information : International Journal on Smart Sensing and Intelligent Systems. Volume 7, Issue 5, Pages 1-5, DOI:

License : (CC BY-NC-ND 4.0)

Published Online: 15-February-2020



We present a hybrid MEMS (micro-electromechanical systems) based spectrometer of the size of a sugar cube, fabricated at the clean room facilities of Fraunhofer IPMS, Dresden. This SGS (scanning grating spectrometer) is designed for integrated spectroscopic applications in the field of food quality analysis and food processing technology. Using another, larger, MEMS-based scanning grating spectrometer, we perform a series of test measurements of the absorption of different types of oil. Thereby, we demonstrate the suitability of this larger MEMS-based SGS for food quality analysis and establish a set of reference measurements. The optical parameters of the sugar cube-sized SGS are then evaluated against the requirements established in the above reference measurements. The spectral resolution of this device is still not sufficient for application in the near infrared, owing to the inaccuracy of one particular production step. Once these changes are in place, we are confident to achieve resolutions below 20 nm. In conclusion, we propose the miniaturised SGS as a mobile spectrometer for insitu analysis integrated with a data processing system.

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