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  • In Jour Smart Sensing And Intelligent Systems

 

research-article | 30-November-2019

Study on the suitability of ZnO thin film for dynamic pressure sensing application

and can provide high purity films (Hoon et al., 2011; Alias et al., 2013). In the present work, RF reactive magnetron sputtering has been used to obtain good quality films with proper stoichiometry. Four samples of ZnO thin films with different thicknesses were prepared by varying deposition duration and these samples were characterized for composition, structural and morphological properties. Suitability of the prepared films for dynamic pressure sensing was evaluated using the shock tube test

Suma M. N., Venkateswarlu Gaddam, M. V. N. Prasad, M. M. Nayak, K. Rajanna

International Journal on Smart Sensing and Intelligent Systems, Volume 13 , ISSUE 1, 1–9

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