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Research Article | 15-February-2020

Annealing Effect on the Structural and Optical properties of SiOx films deposited by HFCVD

presence of hydrogen in as-deposited SiOx films. This band is more intense as the hydrogen flow is increased, but disappears after thermal annealing. SiOx films exhibit a broad photoluminiscence (PL) spectra with main peaks at 700 and 750 nm. The PL band at 700 nm is enhanced as the hydrogen content in the SiOx films is increased. XPS spectra show a high Si concentration and a low oxygen concentration in the SiOx films. Transmittance spectra have a shifted to high wavelength after thermal annealing

J. A. Luna López, A. Benítez Lara, G. García Salgado, D. Hernández de la Luz, M. Pacio, A. Morales Sanchez, S. A. Perez Garcia

International Journal on Smart Sensing and Intelligent Systems, Volume 7 , ISSUE 5, 1–6

Research paper | 13-December-2017

HYDROGEN GAS SENSING PERFORMANCE OF Pt/SnO2 NANOWIRES/SiC MOS DEVICES

M. Shafiei, K. Kalantar-zadeh, W. Wlodarski, E. Comini, M. Ferroni, G. Sberveglieri, S. Kaciulis, L. Pandolfi

International Journal on Smart Sensing and Intelligent Systems, Volume 1 , ISSUE 3, 771–783

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